• TEL : +886-4-2534-7800

    FAX : +886-4-2534-8869

  • CELL : +886-922-111-308

    Company ID：24829839

( Pending ) Aixtron G10 AsP 5x200mm Planetary System

( Pending ) Aixtron G10 AsP 5x200mm Planetary System
( Pending ) Aixtron G10 AsP 5x200mm Planetary System
( Pending ) Aixtron G10 AsP 5x200mm Planetary System
( Pending ) Aixtron G10 AsP 5x200mm Planetary System
( Pending ) Aixtron G10 AsP 5x200mm Planetary System
( Pending ) Aixtron G10 AsP 5x200mm Planetary System
( Pending ) Aixtron G10 AsP 5x200mm Planetary System
( Pending ) Aixtron G10 AsP 5x200mm Planetary System
( Pending ) Aixtron G10 AsP 5x200mm Planetary System
( Pending ) Aixtron G10 AsP 5x200mm Planetary System
( Pending ) Aixtron G10 AsP 5x200mm Planetary System
( Pending ) Aixtron G10 AsP 5x200mm Planetary System
  • Listing ID# 1011253
  • Manufacturer: ( Pending ) Aixtron
  • Model: G10 AsP 5x200mm Planetary System
  • Vintage: 2022
  • Status: Operational

Gas Distribution System Confirgured as follows:
Hydride Lines - AsH3 x2, PH3 x2,  Si2H6/H2 with DD x1, O2/N2 5% x1, Cl2/N2 5% x1
MO Source :TMGa x3, TMAl x3, TMIn x4, CBr4 x1, DMZn x1
Equipped with SMC thermal baths and 1 Ebara ESA100W process pump

More information available on request.