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    Company ID：24829839

Aixtron G10 AsP 5x200mm Planetary System

Aixtron G10 AsP 5x200mm Planetary System
Aixtron G10 AsP 5x200mm Planetary System
Aixtron G10 AsP 5x200mm Planetary System
Aixtron G10 AsP 5x200mm Planetary System
Aixtron G10 AsP 5x200mm Planetary System
Aixtron G10 AsP 5x200mm Planetary System
Aixtron G10 AsP 5x200mm Planetary System
Aixtron G10 AsP 5x200mm Planetary System
Aixtron G10 AsP 5x200mm Planetary System
Aixtron G10 AsP 5x200mm Planetary System
Aixtron G10 AsP 5x200mm Planetary System
Aixtron G10 AsP 5x200mm Planetary System
  • Listing ID# 1011253
  • Manufacturer: Aixtron
  • Model: G10 AsP 5x200mm Planetary System
  • Vintage: 2022
  • Status: Operational

Gas Distribution System Confirgured as follows:
Hydride Lines - AsH3 x2, PH3 x2,  Si2H6/H2 with DD x1, O2/N2 5% x1, Cl2/N2 5% x1
MO Source :TMGa x3, TMAl x3, TMIn x4, CBr4 x1, DMZn x1
Equipped with SMC thermal baths and 1 Ebara ESA100W process pump

More information available on request.