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Aixtron IC2 G5 HT 14x4" GaN

Aixtron IC2 G5 HT 14x4" GaN
Aixtron IC2 G5 HT 14x4" GaN
Aixtron IC2 G5 HT 14x4" GaN
Aixtron IC2 G5 HT 14x4" GaN
Aixtron IC2 G5 HT 14x4" GaN
Aixtron IC2 G5 HT 14x4" GaN
Aixtron IC2 G5 HT 14x4" GaN
Aixtron IC2 G5 HT 14x4" GaN
Aixtron IC2 G5 HT 14x4" GaN
Aixtron IC2 G5 HT 14x4" GaN
Aixtron IC2 G5 HT 14x4" GaN
Aixtron IC2 G5 HT 14x4" GaN
Aixtron IC2 G5 HT 14x4" GaN
Aixtron IC2 G5 HT 14x4" GaN
Aixtron IC2 G5 HT 14x4" GaN
Aixtron IC2 G5 HT 14x4" GaN
Aixtron IC2 G5 HT 14x4" GaN
Aixtron IC2 G5 HT 14x4" GaN
  • Listing ID# 1011252
  • Manufacturer: Aixtron
  • Model: IC2 G5 HT 14x4" GaN
  • Vintage: 2010
  • Status: Operational

Configuration:

Aixtron G5 IC2 HT 14x4'' GaN , 2010 model MOCVD system EpiCurve TT. 

Hydride Lines - NH3_1 / NH3_2 / SiH4/H2 with DD

Gas Distribution system confirgured as follows:

MO Source :TMGa-1, TMGa-2, TMAl-1, Cp2Mg-1, Cp2Mg-2, TMIn-1, TMIn-2, TEG-1, TEG-2

Equipped with (5) RM 6S and (2) RM 25S thermal baths

More information available on request.