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Aixtron IC2 G5 HT 14x4" GaN MOCVD system

Aixtron IC2 G5 HT 14x4" GaN MOCVD system
Aixtron IC2 G5 HT 14x4" GaN MOCVD system
Aixtron IC2 G5 HT 14x4" GaN MOCVD system
Aixtron IC2 G5 HT 14x4" GaN MOCVD system
Aixtron IC2 G5 HT 14x4" GaN MOCVD system
Aixtron IC2 G5 HT 14x4" GaN MOCVD system
Aixtron IC2 G5 HT 14x4" GaN MOCVD system
Aixtron IC2 G5 HT 14x4" GaN MOCVD system
Aixtron IC2 G5 HT 14x4" GaN MOCVD system
Aixtron IC2 G5 HT 14x4" GaN MOCVD system
Aixtron IC2 G5 HT 14x4" GaN MOCVD system
Aixtron IC2 G5 HT 14x4" GaN MOCVD system
Aixtron IC2 G5 HT 14x4" GaN MOCVD system
Aixtron IC2 G5 HT 14x4" GaN MOCVD system
Aixtron IC2 G5 HT 14x4" GaN MOCVD system
Aixtron IC2 G5 HT 14x4" GaN MOCVD system
Aixtron IC2 G5 HT 14x4" GaN MOCVD system
Aixtron IC2 G5 HT 14x4" GaN MOCVD system
  • Listing ID# 1011252
  • Manufacturer: Aixtron
  • Model: IC2 G5 HT 14x4" GaN MOCVD system
  • Vintage: 2010, 2010, 2010, 2010
  • Status: Power Off

Configuration:

Aixtron G5 IC2 HT 14x4'' GaN , 2010 model MOCVD system EpiTT In-situ Monitor.

Hydride Lines - NH3_1 / NH3_2 / SiH4/H2 with DD

Gas Distribution system confirgured as follows:

MO Source :TMGa-1, TMGa-2, TMAl-1, Cp2Mg-1, Cp2Mg-2, TMIn-1, TMIn-2, TEG-1, TEG-2

Equipped with (5) RM 6S and (2) RM 25S thermal baths

More information available on request.