Aixtron 2600G3 12x4" AsP MOCVD system

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Configuration:
Aixtron 2600G3, 12x4" AsP , 2004 model with CACE version V3 MOCVD system.

Gas Distribution Confirgured as follows:
Hydride Lines : AsH3 x 1 , PH3 x 2, 
Dopant Lines : Si2H6 with dilution x 1, DETe with dilution x 1
MO Source :TMGa x 3, TMAl x 2, TMIn x 2, CBr4 x 1, Cp2Mg x 1, DEZn x 1,
Equipped with (2) RM 6S and (2) RM 25S thermal baths and BIG40/100 RF Generator.

More information available on request.