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Aixtron 2600G3 12x4" AsP MOCVD system

Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
Aixtron 2600G3 12x4" AsP MOCVD system
  • Listing ID# 1011223
  • Manufacturer: Aixtron
  • Model: 2600G3 12x4" AsP MOCVD system
  • Vintage: 2007
  • Status: Operational

Configuration:
Aixtron 2600G3, 12x4" AsP , 2007 model with AIXACT version 5.8 MOCVD system.

Gas Distribution Confirgured as follows:
Hydride Lines : AsH3 x 1 , PH3 x 2, 
Dopant Lines : Si2H6 with dilution x 1, DETe with dilution x 1
MO Source :TMGa x 3, TMAl x 2, TMIn x 2, CBr4 x 1, Cp2Mg x 1
Equipped with (4) RM 6S and (2) RM 25S thermal baths and BIG 40/100 RF Generator.

More information available on request.