Rebuild (Upgraded) Aixtron CCS 300mm IC1 Flip Top R&D MOCVD System

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Aixtron CCS 300mm IC1 Flip Top R&D MOCVD System

Wafer Size: 19x2'', 5x4'', 1x6'', 1x8''

System sold "Refurbished" with a six months warranty

Gas Distribution and System confirgured as follows :

Hydride/Dopant Lines : NH3 x 2, Si2H6 x 1, Dummy x1

MO Lines : TMGa x2,TMAl x1,TMIn x2,Cp2Mg x2,Dummy x2

The rebuild TS19X2 GaN MOCVD system as follows :

a. Rebuild Reactor Chamber ( showerhead, bas-bar and ferro-fluidic.. )

b. New Consumable chamber parts ( heater, quartz and moly parts.. )

c. Rebuilt system chiller and thermal baths ( Lauda RM25 x1, RM6S x 5)

d. Overhauled system ESA25 & scroll pump (w/6 months warranty)

e. Refurbished System Power Supply (w/3 months warranty)

g. System Installation and Startup included

    (1) Assist MOCVD system Move-in and Sitting

    (2) MOCVD System Assemble, Power on and Leak test system