Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Voteage: 208V
Hydride Lines - AsH3-1、PH3-1
Dopant Lines - Si2H6、DETe
Gas Distribution system confirgured as follows:
MO 1 - TMGa_1
MO 2 - TMGa_2
MO 3 - TMAl_1
MO 4 - TMAl_2
MO 5 - TMIn_1
MO 6 - TMIn_2
MO 7 - CP2Mg
MO 8 - CBr4
More information available on request.