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Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system

Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
  • Listing ID# 1011242
  • Manufacturer: Aixtron
  • Model: Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
  • Vintage: 2006
  • Status: Refurbished

Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system

Voteage: 208V

Hydride Lines - AsH3-1、PH3-1

Dopant Lines - Si2H6、DETe

Gas Distribution system confirgured as follows:

MO 1 - TMGa_1

MO 2 - TMGa_2

MO 3 - TMAl_1

MO 4 - TMAl_2

MO 5 - TMIn_1

MO 6 - TMIn_2

MO 7 - CP2Mg

MO 8 - CBr4

More information available on request.