Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system

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Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system

Voteage: 208V

Hydride Lines - AsH3-1、AsH3-2、PH3-1、PH3-2

Dopant Lines - Si2H6、DETe

Gas Distribution system confirgured as follows:

MO 1 - TMGa_1

MO 2 - TMGa_2

MO 3 - TMGa_3

MO 4 - TMAl_1

MO 5 - TMAl_2

MO 6 - TMIn_1

MO 7 - TMIn_2

MO 8 - CBr4

MO 9- CBrCl3

More information available on request.