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Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system

Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
  • Listing ID# 1011240
  • Manufacturer: Aixtron
  • Model: Planetary Reactor 2600G3 GaAs 12X4" MOCVD system
  • Vintage: 2000
  • Status: Refurbished

Aixtron Planetary Reactor 2600G3 GaAs 12X4" MOCVD system

Voteage: 208V

Hydride Lines - AsH3-1、PH3-1

Dopant Lines - Si2H6、DETe

Gas Distribution system confirgured as follows:

MO 1 - TMGa_3

MO 2 - TMAl_1

MO 3 - TMAl_2

MO 4 - TMAl_3

MO 5 - TMIn_1

MO 6 - TMIn_2

MO 7 - TMSb

MO 8- CBr4

MO 9 - CBrCl3_1

More information available on request.