Thomas Swan 19x2FT, GaN
System is equipped with Laytec Epicruve and 3 EpiTT .
Hydride source :
NH3 x3 , SiH4 x 2
MO Source configuration:
TMGa x2, TEGa x1, TMAl x2, TMIn x2, Cp2Mg x1, Ge x1,
Complete installation and start up support available from Efab.
More information available on request.