VEECO Veeco TurboDisc K465i GaN MOCVD system

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Veeco TurboDisc K465i GaN MOCVD system

Configuration:
System equipped with :

RealTemp 200 Monitoring System and DRT-210 Real-time In-situ Monitoring System.
. Curvature of Epi-wafer
. Layer Thickness and Refractive Index
. Wafer Pocket Temperature with Wafer Reflection Compensation.

2 EBARA ESA25WD, 2 LYTRON Heat Exchangers and 1 Filter Cart,

Hydride Line : NH3 x 2, SiH4 x 1, 
Source Line :TMGa-1, TMGa-2 , TMAl-1 , TEGa-1, TEGa-2, Cp2Mg-1, Cp2Mg-2, TMIn-1, TMIn-2

System sold without Server PC hard drives & SQL PC hard drives.

 

More information available on request.