(Sold Out) Aixtron G5 + IC2 5x8''

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Configuration:
Aixtron G5 + IC2 5x8'' MOCVD system with Horiba MFC's, EpiTT and Penta Injector.

Gas Distribution Confirgured as follows:
Hydride Lines : NH3 Line x 1 ,  Cl Line x 1,
Dopant Lines : SiH4/H2 with dilution x 1, Cl with dilution x 1
MO Source :TMGa x 2, TMAl x 2, Cp2Mg x 1,
Equipped with (4) RM 6S and (1) RM 25S thermal baths

More information available on request.