TAKANO WM-7SR SURFACE PARTICLE INSPECTION SYSTEM

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TAKANO WM-7SR SURFACE PARTICLE INSPECTION SYSTEM

- Model: WM-7SR
- Bare wafer surface defect inspection system
- Substrate/Sizes: 2" - 8" Wafer Capable (Chuck and Carrier type dependent)
- Substrate Thickness: Semi Standard +/- 100um
- Cassette Handling: Robot arm handling from a single open cassette platform.
- Safety Door for cassette platform
- Defect Sensitivity: 0.079um on Bare-Si
- Throughput 55-60 wph Depending on wafer size
- Illumination Source: Laser Diode, approx 405 nm wavelength
- Fan Filter Unit (FFU) with HEPA filter over measurement chamber
- Signal Light Tower
- Operating Software: Windows 10 Operating Software
- Software Options Including:
   - Auto Sensitivity Calibration
   - X-Y Coordinate Output
   - Map Overlay
   - Haze Measurement 
   - SECS II Communication
- Operations Manual and Documentation
- CE and SEMI Certified
- Brand New
- 1 Year Warranty