Aixtron 2600G3 12x4" AsP

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Configuration:
Aixtron 2600G3, 12x4" AsP , 2007 model MOCVD system.

Gas Distribution Confirgured as follows:
Hydride Lines : AsH3 x 1 , PH3 x 2
Dopant Lines : Si2H6 with dilution x 1
MO Source :TMGa x 2, TMAl x 2, TMIn x 2, CBr4 x 1, Cp2Mg x 1, DMZn x 1
Equipped with (4) RM 6S and (2) RM 25S thermal baths

More information available on request.