(Sold Out) Aixtron G5 IC2 HT 8x6" GaN

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Configuration:
Aixtron G5 IC2 HT 8x6'' GaN , 2011 model MOCVD system with EpiTT and 2 Epison 4.

Gas Distribution Confirgured as follows:
Hydride Lines : NH3 Line x 2 , 
Dopant Lines : SiH4/H2 with dilution x 1, C2H4 with dilution x 1
MO Source :TMGa x 2, TMAl x 1, Cp2Mg x 2, TMIn x 2, TEG x 2
Additional Line : Cl2
Equipped with (4) RM 6S and (2) RM 25S thermal baths

More information available on request.