Aixtron IC2 G5 HT 8x6" GaN

---

Configuration:
Aixtron G5 IC2 HT 8x6'' GaN , 2011 model MOCVD system with EpiTT. 

Gas Distribution Confirgured as follows:
Hydride Lines - NH3 Line x 2 , SiH4/H2 with dilution x 1
MO Source :TMGa x 2, TMAl x 1, Cp2Mg x 2, TMIn x 2, TEG x 2
Equipped with (5) RM 6S and (1) RM 25S thermal baths

More information available on request.