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VEECO - TurboDisc K465i GaN

VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
VEECO - TurboDisc K465i GaN
  • Listing ID# 1001134
  • Manufacturer: VEECO -
  • Model: TurboDisc K465i GaN
  • Vintage: 2009
  • Status: Operational

Configuration:

Upgrade of TurboDisc K465 GaN MOCVD , 45x2" configuration to TurboDisc K465i HT GaN, 14x4''(6x6") 
System equipped with 2 RealTemp 200 Monitoring System and 1 DRT-210 Real-time In-situ Monitoring System.
. Curvature of Epi-wafer
. Layer Thickness and Refractive Index
. Wafer Pocket Temperature with Wafer Reflection Compensation.


Hydride Line : NH3 x 2, SiH4 x 2,
Source Line :TMGa-1, TMGa-2 , TMAl-1 , TEGa-1, TEGa-2, Cp2Mg-1, Cp2Mg-2, TMIn-1, TMIn-2
System equipped with 2 EBARA ESA25WD, 2 LYTRON Heat Exchangers
More information available on request.