Configuration:
TurboDisc K465i HP GaN , 14x4"(6x6")
System equipped with RealTemp 200 Monitoring System and RT-200 / DRT-210 Real-time In-situ Monitoring System.
. Curvature of Epi-wafer
. Layer Thickness and Refractive Index
. Wafer Pocket Temperature with Wafer Reflection Compensation.
Hydride Line : NH3 x 2, SiH4 x 1,
Source Line :TMGa-1, TMGa-2 , TMAl-1 , TEGa-1, TEGa-2, Cp2Mg-1, Cp2Mg-2, TMIn-1, TMIn-2
System equipped with 2 EBARA ESA25WD, 2 LYTRON Heat Exchangers
More information available on request.