Configuration:
TurboDisc K465i HP GaN , 14x4"(6x6")
System equipped with RealTemp 200 Monitoring System and DRT-210 Real-time In-situ Monitoring System.
Hydride Line : NH3 x 2, SiH4 x 1,
Source Line :TMGa-1, TMGa-2 (with dilution) , TMAl (with dilution), TEGa, Cp2Mg (with dilution) , TMIn-1, TMIn-2
System equipped with 2 EBARA ESA25WD, 2 LYTRON Heat Exchangers, 1 RE235 and 5 RE215 thermal baths
More information available on request.