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TEL : +886-4-2534-7800
FAX : +886-4-2534-8869
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CELL : +886-922-111-308
Company ID：24829839
TEL : +886-4-2534-7800
FAX : +886-4-2534-8869
CELL : +886-922-111-308
Company ID：24829839
Thomas Swan 1x2'' InP EPITOR II MOCVD with EPISORB II Scrubber
Gas Distribution and System confirgured as follows :
Dopant Lines : SiH4 x 1, TBP x 2, TBA x 2, Dummy x 2
MO Lines : N.N. x1, TMIn x 2, TMGa x 2, DEZ x1, Dummy x2
More information available on request.