System Configuration :
Aixtron 2400G3 ICHT 8x4'' GaN , 2007 model.
The system is installed and available for demonstration by appointment.
System equipped with six Epison 4 unit, one EBARA ESA25-D and one RF generator Big 100/50 (100kW).
Hydride configuration : HydrideTop, Vent HydrideTop, HydrideBottom, Vent HydrideBottom, MO1 , Vent MO1, MO2, Vent MO2
Source Hydride configuration : NH3-1, NH3-2, SiH4-1, SiH4-2
MO Source configuration : TMGa-1, TMAl-1, TMAl-2, TMAl-3, Cp2Mg-1, NN2-1, TMIn-1, TMIn-2, TEGa-1, NN1-1
Equipped with 10 single thermal baths.
More information available on request.