Aixtron 2800G4 HT 11X4'' or 6x6''(42x2'') GaN Planetary System

---

Configuration:

Aixtron 2800 G4 HT , 11x4'' or 6x6'' (42x2") GaN Planetary System

The system is installed and available for demonstration by appointment.

System equipped with EpiTT or EpicurveTT.

Hydride/Dopant Lines :

NH3 x 2, Si2H6 x 1 ( with dilution ), Si2H6 x 1

MO Source Lines : 

TMGa-1, TMGa-2,,TMAl-1, TMAl-2, Cp2Mg-1, Cp2Mg-2, TMIn-1, TMIn-2, TEGa-1 and CP2Eu-1

Equipped with (6) RM 6S and (1) RM 25Sthermal baths

More information available on request.