Configuration:
AIXTRON 2800G4 HT , 6x6'' (42x2") GaN .
The system is installed and available for demonstration by appointment.
System equipped with EpiTT.
Hydride/Dopant Lines :
NH3 x 2, Si2H6 x 1 ( with dilution ), Si2H6 x 1
MO Source Lines :
TMGa-1, TMGa-2, TEGa-1,TEGa-2, TMAl-1, Cp2Mg-1, Cp2Mg-2, TMIn-1, TMIn-2.
Equipped with (4) RM 6S and (2) RM 25Sthermal baths
More information available on request.