Configuration:
Aixtron G5 IC2 HT 8x6'' GaN , 2011 model MOCVD system EpiCurve TT.
Hydride Lines - NH3_1 / NH3_2 / SiH4/H2 with DD
Gas Distribution system confirgured as follows:
MO Source :TMGa-1, TMGa-2, TMAl-1, TMAl-2, Cp2Mg-1, Cp2Mg-2, TMIn-1, TMIn-2, TEG-1
Equipped with (5) RM 6S and (2) RM 25S thermal baths
More information available on request.