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Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system

Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
Aixtron 2800G4 5x8''(15x4'') AsP MOCVD system
  • Listing ID# 1011205
  • Manufacturer: Aixtron
  • Model: 2800G4 5x8''(15x4'') AsP MOCVD system
  • Vintage: 2011
  • Status: Operational

Aixtron 2800G4 ICHT 11x4'' GaN , 2011 model converted to GaAs or InP based MOCVD system w/EpiTT.

 

Hydride Lines - AsH3_1 - 1000/1000, AsH3_2 - 1000/1000 , PH3_1 - 1000/1000, PH3_2 - 1000/1000,

Dopant Lines - Si2H6_1 - 200/1000, Si2H6_2 with dilution 100/1000/200

 

Gas Distribution system confirgured as follows:

MO 1 - TMGa_1, 500/1000

MO 2 - TMGa_2, 100/1000

MO 3 - TMAl_1, 500/1000

MO 4 - TMAl_2, 200/1000

MO 5 - TMIn_1, 1000/1000

MO 6 - TMIn_2, 1000/1000

MO 7 - DMZn_1 200/1000

MO 8 - CBr4_1, 200/1000 

 

Equipped with (5) RM 6S and (1) RM 25Sthermal baths

 

More information available on request.