Aixtron IC2 CRIUS II-XL, 69x2'' GaN MOCVD system
System equipped with Interferometer, Agus and 2 sets Epison4 unit.
Source Hydride configuration : NH3-1, NH3-2, Si2H6-1, Si2H6-2
Source MO configuration : TMGa-1, TMGa-2, TMAl-1, Cp2Mg-1, Cp2Mg-2, TMIn-1, TMIn-2, TEGa-1 and TEGa-2
System equipped with 5 RM 6S and 2 RM 25S thermal baths.
More information available on request.