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Company ID:24829839
Aixtron Crius II, 55x2'' GaN
System equipped with Interferometer, Agus and 2 sets Epison4 unit.
Source :TMGa-1, TMGa-2, TMAl-1, Cp2Mg-1, Cp2Mg-2, TMIn-1, TMIn-2, 1 Spare
More information available on request.