VEECO - TurboDisc E450 LDM

---

TurboDisc E450 LDM MOCVD System,13x4"(5x6") with Real Temp Pyrometers

The system is de-installed and not a complete set of equipment.

 

Configuration:

Hydride Source Line : AsH3 x 1 ,PH3 x 1 ,

Dopant Lines : Si2H6 (200ppm) x2, DETe (100ppm) x1,

MO Lines : TMGa x3, DMZn x1, TMAl x2, TMIn x2,  Cp2Mg x1.

Equipped with 4 sets RE215 and 1 set RE235 thermal baths

 

More information availabloe upon request.