VEECO - TurboDisc E450 LDM

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TurboDisc E450 LDM MOCVD System,13x4"(5x6") with Real Temp Pyrometers

The system is de-installed and not a complete set of equipment..

 

Configuration:

MO Source Line :

TMGa-1,TMGa-2,TMIn-1,TMIn-2,TMAl-1,TMAl-2,Cp2Mg,DEZn.

Hydride Source Line :

AsH3 x 1 ,PH3 x 1 ,Dopant A Si2H6 x 2 ,Dopant B Spare x 1

System equipped with Veeco Epiview Control Software, Veeco Real Temp Pyrometers

Equipped with 5 sets RE215 and 1 set RE235 thermal baths

 

More information availabloe upon request.