EBARA - Dry Pump SP-20N

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EBARA Dry Pump SP-20N

Pumping Speed: 1670

Ultimate Pressure: 5.0 Pa

Connection - Gas Inlet: NW50

Connection - Gas Outlet: NW50

Approx. Power at Ultimate Pressure (Max. Power): 0.4 kW (2.2 kW)

Cooling Water – Connection: Rc1/4 (Coupler)

Cooling Water - Pressure [Gauge Press.]: Differential Press.: Min. 0.2 MPa / Supply: Max. 0.4 MPa

Cooling Water - Flow Rate: 1.5~3.0 L/min

Cooling Water - Temperature: Max. 30°C

N2 Gas - Connection: 1/4'' Tube Fitting (Same as SWAGELOK)

N2 Gas - Pressure [Gauge Press.] : Supply: 0.15 - 0.7 MPa [Setting: 0.09 - 0.12 MPa]

N2 Gas - Approx. Flow Rate [N2-O Mode]: 17~20 Pa m³/s [2.4 Pa m³/s]

Duct Ventilation Connection: ⌀ 50 mm

Duct Ventilation Pressure: -196 Pa

Duct Ventilation Approx. Flow Rate: 0.5 m³/min

Lubrication Oil Brand: BARRIERTA J100ES (NOK)

Lubrication Oil Quantity: 0.05 L

Approx. Weight: 60 kg

Power Supply - Phase/Volt/Freq: 3 Phase, 380-440V ±10% (50/60Hz±5%)

Power Supply - Power Capacity: 3.2 kVA

Power Supply - Connection: Amphenol C016 20C003 100 12

Control Signal: D-sub 15pin + D-sub 25pin

Communication: RS-232C D-sub 9pin X 2

Main Fuse: 15A

SCCR: 10 kA

More information available upon request.