DOM2012, Epicurve Triple TT system for Aixtron Crius I / TS19x2 MOCVD system
Emissivity corrected pyrometry at 950nm
Reflection measurement with 2 combined wavelengths at 2 )\(405nm/950nm) and 1 (633nm/950nm).
Material:
(1) 3 optical sensor head including light source
(2) 3 detector unitfor reflectance and temperature measurement
(3) 1 curvature measurement head and cables
(4) 6 optical fibers
(5) 20" controller unit incl. mounting brackets
(6) Control and analysis software EpiNet- USB Software Dongle - for online data measurement and analysis