GENMARK - GPR-GB9 Vacuum Robot System

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Genmark GPR-GB9 Vacuum Robot System for Veeco K465I MOCVD system

( Veeco K465I-Robot without Robot cart )

The GPR-GB9 Vacuum Robot System provides accurate, repeatable indexing and transportation of semiconductor wafers in vacuum processing capital equipment down to 10-10 Torr. This robot features Genmark Automation’s breakthrough GPR™ System to achieve the highest level of performance currently available in a 300/450mm compatible vacuum wafer/FPD handler.

The patented GPR technology enables the servo-controlled robot to interface compliantly and intelligently with misaligned cassettes, FOUPS and process modules, as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads.