OEM Part NO:
Laytec In-Situ Monitor for Aixtron TS19x2 MOCVD system, Model: EpiTwinTT, DOM2008
Emissivity corrected pyrometry at 950nm, Reflection measurement with 2 combined wavelengths at 950nm, 405nm
Material:
- 2 optical sensor head including light source
- 2 detector unitfor reflectance and temperature measurement
- 4 optical fibers
- Control and analysis software EpiNet
- USB Software Dongle - for online data measurement and analysis
More information available on request.