EFAB - Aixtron Filter Cartridges

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Dimension: D=126,d=57.51,L=282

OEM Part No. 100153280 (20041116)

Filter Material: Fiber

O-Ring Material: EPDM

Support material: SUS304 galvanized

The air permeability (AIR Permeability): 180 cc / cm2 / sec @ 1/2 "g (CFM)

Weight (weight): 270 g / m2

Filtering accuracy (mesh): 25um (85%)

Operation Constant Temperature: 90 ℃

Maximun Operation Temperature: 120 ℃

Resistance to organic solvent: Fit

Resistance to acid: Fit

Resistance to oxidize: Good

More information available on request.