EFAB - DRT-210

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OEM Model NO : 1096010

DRT-210 Real-time In-situ Monitoring System

The DRT-210 is an integrated, real-time, in-situ process-monitoring system for epitaxial growth on Veeco’s Turbodisc MOCVD reactors. The name derives from the capability to perform “Deflectometer”, “Reflectometer”, and “Thermometer” functions.

Integrated Deflectometer, Reflectometer, and Thermometer to monitor:

- Curvature of Epi-wafer

- Layer Thickness and Refractive Index

- Wafer Pocket Temperature with Wafer Reflection Compensation

More information available on request.