OEM Part NO:
VEECO-E300-E450 FILTER PERFORMANCE TABLE
Product Name: Particle filters
Material: Mixed fibers
O-Ring Material: Viton
Support materials: SUS#304
AIR Permeability: 33 cc/cm2/sec@1/2" g(CFM)
weight: 130 g/m2
thickish: 0.32 m/m
burstingstrength: 12.7 kg/cm2
Operation Constant Temperature: 120°C
Maximun Operation Temperature: 140°C
Resistance to organic solvent: Good
Resistance to ocid: Good
Resistance to oxidize: Good
Collection Efficiency %: Over 15um (95%)
More information available on request.