OEM Part NO: 100003697 ( 0-27040A )
Organometallic Gas Concentration Analyser (EPISON III)
The Epison III is an in-line gas concentration monitor. It determines
gas or vapour concentration in a binary mixture by measuring sound velocity through it. The principle was developed primarily to measure and control the gas concentration of organometallic
reagents in the MOCVD process. It is now acknowledged as the industry standard tool for process control in MOCVD.
The ultrasonic cell consists of a stainless steel chamber through which passes the gas mixture to be analysed. The cell houses two matched 1 MHz ultrasonic disc transducers separated by a known distance, and each held plane parallel by point contact with three stainless steel pins, forming part of glass/metal seals.
A PTFE collar on each transducer provides electrical insulation from a set of three outer pins, which are terminated by spring clips and make electrical contact with the top surface of the transducers.
An integral heat exchanger, consisting of a helical pipe welded to the outer wall of the cell ensures that the incoming gas mixture equilibrates to the cell temperature. The temperature of the cell is measured to within 0.03°C by a platinum resistance thermometer embedded within the outer wall of the cell.
More information available on request.