OEM Part NO: 100061286 (9-12539)
TS19X2 TS6X2 MOCVD system - Filter Cartridge*Pall*Exhaust :
1. Filter material: Polypropylene
2. O-Ring material: EPDM
3. AIR Permeability: 0.50 cc/cm2/sec@1/2" g(CFM)
4. Weight: 20 g/m2
5. Thickish: 0.12 m/m
6. Burstingstrength: 5 kg/cm2
7. Operation Constant Temperature: 850°C
8. Maximun Operation Temperature: 1250°C
9. Resistance to organic solvent: Fit
10. Resistance to ocid: Fit
11. Resistance to oxidize: Fit
12. Collection Efficiency %: Over 6um (99.5%)
More information available on request.