EFAB - Filter Cartridge Pall Exhaust

---

OEM PN: 100061286 (9-12539)

TS19X2 TS6X2 MOCVD system - Filter Cartridge*Pall*Exhaust :

1.   Filter material: Polypropylene

2.   O-Ring material: EPDM

3.   AIR Permeability: 0.50 cc/cm2/sec@1/2" g(CFM)

4.   Weight: 20 g/m2

5.   Thickish: 0.12 m/m

6.   Burstingstrength: 5 kg/cm2

7.   Operation Constant Temperature: 85 °C

8.   Maximun Operation Temperature: 125 °C

9. Resistance to organic solvent: Fit

10. Resistance to ocid: Fit

11. Resistance to oxidize: Fit

12. Collection Efficiency %: Over 6um (99.5%)

More information available on request.