EFAB - Tungsten Heater (All Zones)

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OEM PN: 100000727 (0-30800A)

Aixtron Crius 31x2" W(tungsten) Heater Zone ASSY ALL ZONES

Application equipment:

1) Type–  AIXTRON CRIUS 31(30) x 2” ASSY ALL ZONES

2) Test Condition

    Temperature: ~1300°C

3) Change 1 mm to 2 mm for PBN thickness to reduce risk of failure phenomenon.

4) Result

    Life time; more than 2,000Hr

5)  It is possible for overhaul

(Break up -> Cleaning -> Parts change -> Assembling)

.Functional improvements & Performance enhancement

More information available on request.