EBARA - ESA25-D Dry Vacuum Pump
                                                        
                                
                                    - Listing ID# 1401027
- Manufacturer: EBARA -
- Model: ESA25-D Dry Vacuum Pump
- Vintage: 
- Status: Refurbished
 
                            
                            OEM Part NO: 100001928 (40080513)
Dry Pump*ESA25-D*208/400V*Multi-Stage*
Model ESA25-D dry vacuum pumps have the largest installed base pump on
MO-CVD applications. Model ESA dry vacuum pumps also feature
intelligent rotation sequence for high gas loads and advanced
interlock function.
 
Pumping Speed 50/60Hz 2,500/3,000 L/min
Ultimate Pressure 50/60Hz  5.3/4.0 Pa
Gas Inlet NW50
Gas Outlet NW40
Motor Power 3.7 kW
Cooling water 3.5 - 8 L/min
N2 Gas 11 - 13 L/min
 
More information available on request.