EDWARDS - IXH645H
- Listing ID# 1401020
- Manufacturer: EDWARDS -
- Model: IXH645H
- Vintage:
- Status: Refurbished
The iXH family of dry pump products is an evolution of Edwards market-leading iH products and sets
new standards for harsh process capability, reliability and low cost of ownership.
• Greater pumping speed
ͳ Fewer pumps required per chamber
ͳ Leads to reduced footprint, weight,
maintenance, installation and overall cost of
ownership
• More process capability for longer service intervals
ͳ Greatly increased powder handling capability
ͳ Wide temperature range allows optimisation
of pump to minimise by-product accumulation
through condensation and plating
ͳ Optimised ‘5-in-1’ purging distribution
that protects O-rings from chemical attack,
eliminates pump cold spots, keeps powder
moving through the pump, reduces chance of
deposition or corrosion and increases hydrogen
pumping capability.
ͳ iXH500 series designed and field proven to
provide longer service intervals on highly
corrosive applications
ͳ Greatly increased hydrogen pumping speed
capability
• Reduced cost of ownership
ͳ SEMI® E54 compatible and ‘Green Mode’
capable
ͳ Longer overhaul intervals and less unscheduled
down time
• Standalone booster pumps can be located close to
customer chamber to maximise gas throughput
• Complies with key international standards,
including UL, CE and S2
• Multiple pumps can be integrated together as
single point of connection systems allowing easy
hook up and reduced installation times.
Edwards have the perfect range of high capacity dry
pumps and boosters that can meet the ever increasing
gas flow requirements encountered in the FPD, solar,
semiconductor and LED manufacturing industries. As
well as high peak pumping speed these pumps are
equipped with features to ensure maximum reliability
on harsh processes.
Peak speed : 730
System power at ult : 8.4
Inlet connection : 100
Outlet connection : 40
Water flow at minimum pressure differential : 10
Purge flow range : 60
Mass : 550
