HBLED Facility ( GaN Facility ) R&D / OEM & ODM

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HB LED Facility ( GaN  Facility )

 

Facility Powered - Environmental Controls Running.

 

Major Products / Services : Epi-wafer Growth

 

Epi - Wafer Production Capacity : 

Max.Daily production capacity: ~1,100 pcs ( 2" GaN wafer )

Max.Monthly production capacity: ~32,000 pcs ( 2" GaN wafer )

 

 

 

Land Area : ~28,000 m2

 

Building  : The four-story plant , SRC Manufacturing.

 

Equipment List :

 

Product / type / Manufacturer / Model

 

Epi  Reactors AIXTRON  Crius I , 31x2" GaN , ~10 sets

 

Epi Reactors VEECO  K465i , 54x2'' GaN , 1 set

 

Epi  Automatic PL Mapping System EtaMax PLATO , 5 sets

 

Epi  X-RAY Panalytical X'pert Pro HRXRD system

 

Epi  Helium leak detector  INFICON  UL1000 , 4 sets

 

FEOL  Auto Spin Coater Track system ELS3604FA  , 4 sets

 

FEOL  Mask Aligners Japan Science MA4200, Auto Mask Aligner , 3 sets

 

FEOL  E-Beam Evaporator System F.S.E FU12PEB/FU16PEB , ~4 sets

 

FEOL  O2 Plasma clean F.S.E IRP-ICP , 2 sets

 

FEOL  Etchers SAMCO RIE-212iPC , ICP Etching System , ~4 sets

 

FEOL  Sputter F.S.E FU-16PSB , 7 sets

 

FEOL  Laser Lift off system-IX-260-ETN ChromAblate 

 

BEOL  Wafer Prober MPI Corporation LEDA-8F 3GPLUS , ~80 sets

 

BEOL  Laser Scriber Disco DFL7340/DFL7160 , 14 sets

 

BEOL  Sorter ASM MS899-DL/MS899-DLA/MS100 , ~ 40 sets

 

BEOL  GaN Grind Machine  SpeedFam 32 BSG-V , ~7 sets

 

BEOL  GAN Lapping Polish Machine SPEEDFAM 32DPAW/32GPAW-TD , ~9 sets

 

BEOL  Fully automatic Breaker Machine , ~ 15 sets

 

Factory Fork Lift Trucks SUMITOMO , 2 sets

 

Facility Gas Purification Systems (H2 / N2 / NH3...)

 

Facility Gas Cabinets - Panels (H2 / N2 / NH3 / SiH4 ...)

 

Facility WET Scrubbers / Chillers ..

 

Facility available for inspection by appointment to qualified buyers only.