HBLED Facility ( GaN / GaAs Facility ) R&D / OEM & ODM

---

HB LED Facility ( GaN / GaAs  Facility )

 

Facility Powered - Environmental Controls Running.

 

Major Products / Services : Epi-wafer Growth

 

Epi - Wafer Production Capacity :

Max.Daily production capacity: ~3,500 pcs ( 2" GaN wafer )

Max.Monthly production capacity: ~100,000 pcs ( 2" GaN wafer )

 

Land Area : ~13500 m2

 

Building  : The five-story plant , SRC Manufacturing.

 

Equipment List :

 

Product / type / Manufacturer / Model

 

Epi  Reactors AIXTRON  Crius I , 31x2" GaN , ~30 sets

 

Epi  Reactors AIXTRON  Thomas Swan , 19x2" GaN , ~14 sets

 

Epi  Reactors  AIXTRON 2600G3 IC , 12*4 , AlInGaP , 2 sets

 

Epi  PL   Nanometrics  RPM-VERTEX/RPM-BLUE/RPM-2000 , 5 sets

 

Epi  XRD  Bruker D8 Disoover / BEDE D1 HRXRD system

 

Epi  Helium leak detector  INFICON  UL1000 , 9 sets

 

FEOL  Auto Coater 8600/8800 Series system , 5 sets

 

FEOL  Mask Aligners Japan Science MA4200, Auto Mask Aligner , 16 sets

 

FEOL  E-Beam Evaporator System FU12PEB/FU16PEB/FU20PEB , 20 sets

 

FEOL  Etchers SAMCO RIE-212iPC , ICP Etching System , 9 sets

 

FEOL  PECVD Oxford Plasmalab 800Plus , 10 sets

 

FEOL  Auto LED Wafer Prober MPI Corporation LEDA-8F.. , 10 sets 

 

Facility Gas Purification Systems (H2 / N2 / NH3...)

 

Facility Gas Cabinets - Panels (H2 / N2 / NH3 / SiH4 ...)

 

Facility WET Scrubbers / Chillers ..

 

Facility available for inspection by appointment to qualified buyers only.