LED Facility ( GaN Facility )
Major Products / Services :
Product type | Manufacturer | Model | |
Epi | Reactors | Thomas Swan | 19x2FT, GaN |
Epi | Microscope | Olympus | Olympus BX51 Microscope |
Epi | Microscope | Olympus | Olympus MX51 Microscope |
Epi | Tester | QUATEK | Hall EFFECT SYSTEM |
Epi | PL | QUATEK | RPM PL MEASUREMENT |
Epi | RTP | AllWin21 | RTP Acuu Thermo AW410 Rapid Thermal Annealing |
Epi | XRD | Bruker | Bruker D8 Discover |
Epi | Tester | Taiwan OEM | EL quick tester |
Chip | Dryer | ASSI | Spin Rinse Dryer / SV-702 |
Chip | PECVD | AST | Cede-100L , PECVD |
Chip | ICP-RIE | AST | Cirie-200 ,ICP-RIE |
Chip | ICP-RIE | AST | Crie-100 , ICP-RIE |
Chip | Evaporators | AST | Peva-600E , Metal Evaporation |
Chip | Evaporators | AST | Peva-600I , ITO Evaporation |
Chip | Mask Aligners | ELS | ELS 106SA, Semi-Auto Mask Aligner |
Chip | Coaters | ELS | ELS 306MA, Manual Spin Coater |
Chip | Surface profiler | FORCE | FORCE Step-4 Surface profiler |
Chip | Tester | Napson | RG-7C & RT-70V , Manual four point probe sheet resistance |
Chip | Surface profiler | SCI | FilmTek™ 1500 - Thin flim metrology system |
Chip | Bonders | AST | Tbon-100 , Wafer Bonder |
Chip | Tester | Taiwan OEM | LED manual measurement system |
Chip | Tester | Taiwan OEM | USB-LED-CM Beam Star software |
Chip | Furnaces | SJ | LED 6"Diffusion furnace , SJ100-1200-1 |
Chip | Clean Bench | Taiwan OEM | Exhaust Bench |
Chip | Clean Bench | Taiwan OEM | CS702 , Ultrasonic Chemical Wet Bench |