ULVAC - SCH-135B Sputtering

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Sputtering Systems for Solar Cells

 

SCH-135 System

 

The SCH-135 is an in-line sputtering system for deposition of metal and metal oxide films. The system is designed for high throughput and low cost and has a large install base for solar cell production.

 

Features

1.) Available for large substrate sizes.

2.) High throughput.

3.) Low system and operation cost.

4.) Low maintenance requirement.

 

Applications : a-Si Solar Cells

 

Specifications

1.) Substrate size : 1100X 1400 X 5 mm

2.) Productivity : 40 substrates / hour

More information available on request.