Sputtering Systems for Solar Cells
SCH-135 System
The SCH-135 is an in-line sputtering system for deposition of metal and metal oxide films. The system is designed for high throughput and low cost and has a large install base for solar cell production.
Features
1.) Available for large substrate sizes.
2.) High throughput.
3.) Low system and operation cost.
4.) Low maintenance requirement.
Applications : a-Si Solar Cells
Specifications
1.) Substrate size : 1100X 1400 X 5 mm
2.) Productivity : 40 substrates / hour
More information available on request.