QC3 is a High Resolution XRD (HRXRD) system for epilayers (thin films).
It is designed for high-throughput, mass production operation.
*Highest throughput in the market
*Uses world-leading Jordan Valley RADS Software for auto-analysis and feedback to production
*Rich & flexible in features, yet user-friendly and easy to operate
*Robot support (optional)
*Targets production fabs of LED and Epilayers wafers
*Supports multi-wafer configuration in a single sample-plate
*High up time & reliability
Materials :
The QC3 is suitable for most semiconductor-based structures and device structures, including, but not limited to:
*GaN-based LEDs and laser structures
*III-V, II-VI and IV-IV based materials (HEMTs, HBTs...)
*Si based materials
*SiGe-based HBT structures
*Single and multilayer epitaxial films
*MQW structures
*Superlattice structures