ASSI SV-805M1 , Spin Rinse Dryer

---

ASSI suite of high performance, innovative processing tools leverages its core SRD (Spin, Rinse, & Dryer) systems and with the expert teams with more than 20 years of experience in semiconductor equipment.

ASSI SRD produces repeatable results. No other machine made will rinse and dry as effectively as the ASSI SRD systems. Quality engineered throughout, the ASSI SRD system is the standard of the industry.

Utility Spec.
Electrical Power : 120 VAC & 50/60 Hz / ＞15A ,Rang: +/- 10%
Power Max :  < 1.5 KW , 50 Ω Ground
Applied Gas :  Class 100 Dry PN2 , Flow : SV-702 : 4~6 CFM 35~ 40 PSI , 3/8" OD
Pneumatic Gas :  Class 100 Dry Air or GN2 , Flow : 3~6 CFM Over 40 PSI , 1/4" OD
UPW : Up to 17 Meg Ohm UPW , Flow : 1.5~2.0 GPM 25~30 PSI , 3/8" OD 

Control Function:
Process Procedure : Up to 20 set Memory and 10 Step for Rinse & Dry Set Program Function
Setting Time ( etc step) : 0 ~ 9999 sec Each Step
Guaranteed particle counts : Dry Only: < 30 Added At 0.3 Micron or Better
Watermark residue counts : 0.01%
Resistivity Control : Each Rinse Step ≦ 19 Mega Ohm or After Rinse Time ≦ 600 sec ( Can Set Time )
Static Eliminator : ±5.5 KDCV Discharge (Option)
Motor Max Speed : 3000 RPM ( Unload) , 805 Setting up to 2800 RPM
Speed Tolerance :  ≦ 3%
Special Function : Auto-Run Recipe & Recycle Setting ,Error Code Memory
Error Code : Resistivity Error ,Door Unlock，Low Pressure，Heat Error，Motor Error
Application Size : SV-805 :8" Circular Substrate Load Carrier