Thomas Swan Episorb II Dry Toxic Gas Scrubber

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Episorb II Dry Toxic Gas Scrubber:

Principle of Operation Thomas Swan Episorb II Dry Toxic Gas Scrubber is a Waste Gas Processing System that removes toxic and environmentally harmful gases exhausted by III-V MOCVD processes.
 Columns containing dry adsorption materials remove toxic products for later oxidation.
Typical compounds that can be adsorbed include gaseous hydrides such as Arsine and Phosphine, and in addition, metal-organic vapours. Gases such as Nitrogen, Hydrogen and Helium pass through the Episorb unaffected.

Principle of Operation:
Process exhaust gases pass through one of two columns containing a material that adsorbs reactive and toxic components. After adsorption has occurred and after an initial Nitrogen purge, the Episorb passivates the adsorbed materials through a process of oxidation.

Control:
The system is PLC controlled for ease of operation. There is simple control to run Adsorption, Purge and five different consecutive oxidation cycles, allowing the scrubber to be ‘customised’ to the MOCVD process in use. All RTD temperatures are displayed, and
 the system offers operator adjustable alarm temperatures for Adsorb and Oxidation modes, as well as operator adjustable flow rates for each stage. Data Log facilities are available for previous oxidation
 stages, giving data for Total time, Total airflow, Total N2 flow, and Time air actually flowed.

Safety:
The system offers full safety features, including full continuous monitoring of critical internal conditions, as well as safety interlocking between Episorb, external Toxic monitors, external Safety equipment, and MOCVD equipment. The system has safe fail modes, including interlocks for:
1. Charcoal bypass filters in the unlikely event of column breakthrough,
2. Full over temperature monitoring and control,
3. Over pressure relief.
4. Extract Air Failure
5. Pneumatic Air Failure
6. Cabinet Doors Open
7. Discharge Ball valves open

Maintenance:
The system has a vacuum fill facility as standard, allowing the system to be re-charged in around seven minutes.
The system offers full provision for the safe discharge of the scrubber medium into the disposal controllers.

System Compatibility:
The system is compatible with all major MOCVD reactor systems eg. Thomas Swan, Aixtron & Emcore.

Why Thomas Swan Episorb II?
1. Ease of use—PLC control
2. Ease of control - customisable to your MOCVD process
3. Safety - Full safety interlocking and programmable temperature alarms
4. Quality - Thomas Swan has been registered to ISO9001 since 1993, and systems are manufactured to conform to CE standards
5. Proven design - an industry standard scrubber.
6. Reliability
7. MOCVD specialists - Thomas Swan have been in the MOCVD industry since 1983