VVT HBM-800G Vacuum Burnout Furnace

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Furnace is
• Vacuum Burnout Furnace is designed to support LED manufacturing in cleaning MOCVD deposits on the graphite platters / susceptors in heating process.
• The maximum operating temperature is 1400 ℃, so the heating materials used for hightemperature high-density graphite, heat resistance heating principle and Multi-layer graphite felt, graphite sheet and water-cooled chamber.

Benefits
• Maintain high performance of graphite platters by removing contaminating residues and deposits.
• Reclaimed wafers polishing and cleaning in LED industry.

the HBM-800G is a Burnout Furnace for cleaning MOCVD reactor parts.

SPECIFICATIONS:
1.Layout dimension : W 2650mm L 2819mm H 2400mm
2.Heating Area Size : Ø890mm x L850mm
3.Working Area Size : Ø630mm x L840mm
4.Capacity : 120Kg~200Kg
5.The power of heater : The circular cylinder of graphite heater Single 3-phase  380V /480V;  Total heating power 85KVA~120KVA
6.Heat insulation system : Multi-graphite felt、Graphite sheets (soft)
7.The highest temperature : 1450°C (Overheating limit)
8.Partial gas selection : N2 / Forming gas
9.Backfill gas selection : N2

PERFORMANCE
1.Max heating speed : above12°C /min (Empty furnace)
2 The uniformity of temperature : 1400°C, 9 point temperature test ±5°C
3.The final vacuum degree : 10-3  Torr (at R.T)
4.Pumping speed : In clean chamber，pumping  30min at least 10-2  Torr
5.Chamber leaking rate : 5 x10-8 atm * cc / sec
6.Max gas quenching pressure : 550~650 Torr
7.Max cooling speed : In empty furnaces cooling  from1400°C to 60°C，in 100~180 minutes
8.Partial pressure setting : 0.1-25  Torr

More information available on request.