CALITECH SRD Dual-Chamber (Spin Rinse Dryer) CT-608D

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CALITECH
Vertical Type-Dual chambers Spin Rinse Dryer
SRD Dual-Chamber (Spin Rinse Dryer) CT-608D

Applications Spin Rinse Dryer wafer or remove the remains
Features Customized design of the rotor、 Supply to the biggest wafer 200mm(8inch)、 The most Spin RPM 2400 RPM、 DI water clean、 Pipe purge、 Spin dryer with hot N₂ (70℃)、 N₂ Low pressure switch、 Water resistance meter、 Anti-static devices、 EMO (emergency stop devices)、 Supported 15 recipes and 10 step/recipe、 Supported warning & alarm window let user can fix problem soon.

Wafer Size : 6" Wafer / 4" Wafer
Motor PRM Range: 400~2400
Step setting Qty per recipe :  10
Recipe Setting qty : 15
PLC Control / 1 to 1 : 2 SET
Maxi Rotor Vibration(um) : < 350 um
Motor Speed Inaccuracy (±RPM) : ±5%(Full Scale)
Rotor Stopper (RSP) : Yes / 2 SET
Motor Speed Indicator : Yes / 2 SET
Anti-Static Unit : Yes / 2 SET
Chamber Material SUS316-EP / Rotor Material SUS316-EP / Frame SUS304+PP
Brushless Motor : Yes / 750W / 2 SET
O-ring Material Viton / Valve and Fitting Material PP / PVDF / PTFE / PFA
DIW Rinse Module Independent Maifold Module : 2 SET
HN2 Dry Module Independent Maifold Modul : 2 SET
Bowl heater 1 chamber =2PS x 300W :  2 SET
HN2 Heater 1 chamber =1SET x 700W : 2 SET
Resisance meter EC-410 (Digital)
Voltage :  1Φ 220V 16A.