Nanometrics RPM2000 Rapid Photoluminescence Mapper
Laser : 532nm / 785 nm
Wafer Carrier : 2 inch / 4 inch / 6 inch
Grating :
- 300 g/mm - 762
- 150 g/mm - 1250
Detector :
- CCD 1024 TE ( C7041 CCD Multichannel Detector Head )
- InGaAs ( C7221 InGaAs Multichannel Detector Head )
Filter : 570 mm HP / 850 mm HP
System Dimensions :
780mm(w) x 700mm(D) x510mm(H)
Weight excluding PC : 78kg
Single phase AC 100V-240V, 400VA
Light vacuum for wafer chuck.
More information available on request.