HITACHI S-3000H High Vacuum Scanning Electron Microscope (SEM)
The list of system specifications :
1. Secondary electron image : 3.0 nm (at 25 kV, high vacuum mode)
2. Magnification: x 15 ~ x 300,000 (65 steps)
3. Acceleration voltage: 0.3 ~ 30 kV
4. Specimen size : 150 mm dia. ( maximum )
5. Image shift : ± 20 um ( at W.D. = 15 mm )
6. Electron gun : W (Tungsten) hairpin filament
7. Detectors : Secondary electron detector
8. Frame memory : 640 x 480pixels /1280 x 960 pixels